Scanning electron microscope with a chamber which can be broken down, particularly for observing pieces of relatively large dimensions
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United States of America Patent
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Jan 26, 1982
Grant Date -
N/A
app pub date -
May 29, 1980
filing date -
Jun 12, 1979
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An electron microscope including a base, a frame supported by said base, a vacuum chamber supported by said frame and including a fixed cup-shaped member having a lateral aperture closed by a movable cover, the latter including a further interchangeable cup-shaped member with its concavity facing said aperture, and supported by substantially horizontal guide means rigid with said frame for moving from and towards said fixed cup-shaped member; support means being provided inside said further cup-shaped member for supporting a piece holder in an adjustable position.
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