Turbomolecular vacuum pump having virtually zero power magnetic bearing assembly with single axis servo control
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jan 26, 1982
Grant Date -
N/A
app pub date -
May 21, 1979
filing date -
May 21, 1979
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A turbomolecular vacuum pump utilizes a virtually zero power magnetic bearing assembly with a single axis sevo control and has an optimized L/D ratio and an optimized number of pole faces. In such a structure, radial stiffness is low and radial damping is high so that single axis control is possible. A frusto-conical mechanical bearing structure is shown as a fail-safe back-up for the magnetic suspension system taught.
First Claim
Family
International Classification(s)
- [Classification Symbol]
- [Patents Count]
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully