Processing chamber with an air flow reverser
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United States of America Patent
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-
Jan 12, 1982
Issued Date -
N/A
app pub date -
Nov 23, 1979
filing date -
Nov 13, 1978
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An air flow reverser apparatus for use in association with an air flow system having air supply and return port means, said apparatus comprising a main supply duct, and a main return duct, said ducts being connectable to said respective supply and return port means of said air flow system, at least two branch supply ducts communicating with said main supply duct, at least two branch return ducts communicating with said main return duct, supply damper means for selectively shutting off at least one of said branch supply ducts, while leaving at least one said branch supply duct open, return damper means for selectively shutting off at least one of said branch return ducts while leaving at least one said branch return duct open, and means interconnecting said supply and return damper means whereby when a selected one of said branch supply ducts is closed, a selected one of said branch return ducts is open, and power operated means for moving the same from one position to another simultaneously.
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