Exchangeable Ga-Cu electrode for an evaporation system
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United States of America Patent
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Sep 15, 1981
Issued Date -
N/A
app pub date -
Feb 15, 1980
filing date -
Sep 9, 1978
priority date (Note) -
Expired
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Abstract
Ga-Cu alloy having the formula of Ga.sub.1-x Cu.sub.x, wherein x is a composition ratio parameter of Ga and Cu in a range of 0.000.ltoreq.x.ltoreq.0.05. The alloy has a stable liquid phase at the normal temperature. The Ga-Cu alloy Ga.sub.1-x Cu.sub.x with a composition ratio parameter x (0.0001.ltoreq.x.ltoreq.0.03) is assembled into the exchangeable electrode of an evaporation system in such a way that the Ga-Cu alloy is filled in a clearance portion between a fixed electrode section fixed within the vacuum chamber of the evaporation system and an exchangeable electrode section on which an evaporation source is to be placed. With this construction, both of the fixed and exchangeable electrode sections are electrically connected with each other via the Ga-Cu alloy, and the exchangeable electrode section can be easily and rapidly removed from and placed onto the fixed electrode section.
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