Cathode shielded coating apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 4279216
SERIAL NO

06115729

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Abstract

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A vacuum evaporator includes a housing defining a vacuum chamber which has mounting for an evaporative material and an electrode spaced from the evaporative material which is arranged adjacent the support for a substrate to be coated. A screening element is located between the electrode and the substrate support in the vacuum chamber. The vacuum chamber has a gas inlet port through which gases may be passed.

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Patent Owner(s)

Patent OwnerAddress
BALZERS AKTIENGESELLSCHAFT FUR HOCHVAKUUMTECHNIK UND DUNNE SCHICHTENLIECHTENSTEIN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Buhl, Rainer Sargans, CH 12 188
Signer, Hans Oberschaan, CH 7 73

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