Large crystal float zone apparatus

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United States of America Patent

PATENT NO 4258009
SERIAL NO

05904103

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Abstract

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Apparatus for the float zone refining of large semiconductor crystals. Additional support in the form of lightweight pins is provided for the growing monocrystalline rod to hold the rod on the proper vertical axis. The pins protrude from the telescoping inner wall portion of the refining enclosure. This telescoping enclosure portion allows the pins to be in synchronous motion with the monocrystalline rod and also reduces the overall height of the apparatus.

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Patent Owner(s)

  • TOPSIL A/S;TOPSIL A/S FREDERIKSSUND

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
De, Leon Noel Frederikssund, DK 5 42
Jensen, Erik H Hundested, DK 1 7
Knudsen, Poul E Randboel, DK 1 7
Larsen, Arno I M Holbaek, DK 1 7

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