Vacuum evaporation apparatus
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United States of America Patent
Stats
-
Aug 19, 1980
Grant Date -
N/A
app pub date -
Jun 27, 1978
filing date -
Jul 8, 1977
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
The vacuum evaporation apparatus comprises a housing having walls definingn evacuable evaporation chamber with an evaporator in the chamber disposed below a supporting structure for the substance to be coated and including an annular screen disposed around the evaporator between the evaporator and the walls of the housing so that only an opening or angle between the evaporator and the supporting structure is left which is sufficient for the vapor deposition of the substrates. The screen is of a material which may be heated, such as a metal material, which may be electrically heated.
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