Device for measuring the reflection of a plane, specularly reflecting surface

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United States of America Patent

PATENT NO 4201479
SERIAL NO

05909808

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The present invention relates to a device for measuring the reflection of a plane, specularly reflecting surface, in which a measuring beam of radiation is directed onto the surface to be measured through an optical converging lens and the radiation reflected from the surface is directed through the same lens to a radiation receiver. In such a system, preferably, the optical connections between the source of radiation and the converging lens and between the lens and the radiation receiver are established by means of a fiber-optical photoconductor or a lens and mirror systems. Such a device may be employed, for example, for measuring the reflection of thin layers deposited in a vacuum evaporator.

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Patent Owner(s)

  • BALZERS AKTIENGESELLSCHAFT FUR HOCHVAKUUMTECHNIK UND DUNNE SCHICHTEN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lardon, Marcel A Maienfeld, CH 1 5

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