Transfer and temperature monitoring apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 4201152
SERIAL NO

05881340

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The temperature of a substrate being coated by molecular beam epitaxial techniques is monitored during the deposition process. The substrate is mounted on a holder that is brought by a carriage to a treating station where the deposition occurs. At the station, a pair of metal contact pins selectively contact a surface of the holder. One of the contact pins and the surface, when contacting, form a first thermocouple junction; a second thermocouple junction is formed by the second contact pin and surface. The thermocouple junctions have dissimilar properties so that a voltage indicative of the temperature of the object is derived between them while the pins and surface contact each other. The holder is transferred between the treating station and carriage by translational and rotational motion of the holder and the carriage. While the translational and rotational motions occur, contact between the surface of the holder and the pins is prevented.

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Patent Owner(s)

  • DKP, A CORPORATION OF CA;VEECO COMPOUND SEMICONDUCTOR INC.

International Classification(s)

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  • 1978 Application Filing Year
  • C23C Class
  • 123 Applications Filed
  • 4 Patents Issued To-Date
  • 3.26 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances197819791980198119821983198419851986198719881989199019910255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Luscher, Paul E Sunnyvale, CA 25 820

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  • 17 Citation Count
  • C23C Class
  • 0 % this patent is cited more than
  • 45 Age
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