Wafer support
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United States of America Patent
Stats
-
Jan 8, 1980
Grant Date -
N/A
app pub date -
Mar 14, 1978
filing date -
Mar 14, 1977
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A wafer support, comprising, a baseplate with an aperture therein and a hing ring rotatably positioned in the aperture. A platform is defined in the holding ring for supporting the peripheral edges of a wafer disposed therein and the holding ring includes a plurality of spaced slots extending parallel to the platform and spaced therefrom. A plurality of retaining rods are connected to the baseplate and extend into the slots to engage over the wafer positioned on the platform. A portion of the holding ring adjacent each slot defines a retaining rod abutment for urging each retaining rod out of its respective slot when the holding rod is rotated in the baseplate to release the supported wafer.
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