Method of producing a high vacuum in a container
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United States of America Patent
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Jan 1, 1980
Grant Date -
N/A
app pub date -
Oct 13, 1978
filing date -
Feb 2, 1977
priority date (Note) -
Expired
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Abstract
A method of producing a high vacuum in a container which has limiting wallshich define a reaction chamber which is adapted to be evacuated for vacuum processing purposes, and in which gases are sorbed during vacuum operation and the gases are removed subsequently by increasing the temperature of the walls and evacuating the chamber at the same time includes heating the reaction chamber, sensing the underpressure in the reaction chamber and controlling the heating of the chamber in accordance with the sensed pressure in a manner such that the underpressure remains within a preselected upper and lower limit value until a predetermined temperature of the walls is attained.
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