OPTICAL DETECTING DEVICE, MANUFACTURING METHOD THEREFOR, AND ELECTRONIC EQUIPMENT
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United States of America
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Issued Date -
Apr 10, 2025
app pub date -
Jul 28, 2022
filing date -
Jul 28, 2022
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Abstract
Collapses of pillars are suppressed. An optical detecting device includes a pixel array section having multiple pixels that are arranged two-dimensionally therein. Further, each pixel of the multiple pixels includes a photoelectric converting section provided on a semiconductor layer and a metasurface structure that is arranged on a light incidence surface side of the semiconductor layer and that guides incident light to the photoelectric converting section. Moreover, the metasurface structure includes multiple pillars that are arranged at distances therebetween which are shorter than a wavelength of the incident light and a transparent support that connects and supports at least some of the multiple pillars.
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