SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

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United States of America

APP PUB NO 20250120179A1
SERIAL NO

18983443

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Abstract

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An object is to provide a semiconductor device having a structure with which parasitic capacitance between wirings can be sufficiently reduced. An oxide insulating layer serving as a channel protective layer is formed over part of an oxide semiconductor layer overlapping with a gate electrode layer. In the same step as formation of the oxide insulating layer, an oxide insulating layer covering a peripheral portion of the oxide semiconductor layer is formed. The oxide insulating layer which covers the peripheral portion of the oxide semiconductor layer is provided to increase the distance between the gate electrode layer and a wiring layer formed above or in the periphery of the gate electrode layer, whereby parasitic capacitance is reduced.

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Patent Owner(s)

Patent OwnerAddress
SEMICONDUCTOR ENERGY LABORATORY CO LTDATSUGI

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kuwabara, Hideaki Isehara, JP 320 25720
Noda, Kosei Atsugi, JP 186 3625
Ohara, Hiroki Sagamihara, JP 176 4340
Sasaki, Toshinari Atsugi, JP 305 5635
Yamazaki, Shunpei Tokyo, JP 7534 239327

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