TRENCH MOAT DECOUPLING CAPACITOR
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United States of America
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Issued Date -
Apr 10, 2025
app pub date -
Oct 5, 2023
filing date -
Oct 5, 2023
priority date (Note) -
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Abstract
Embodiments of present invention provide a capacitor structure. The capacitor structure includes a moat capacitor embedded in a substrate. The moat capacitor includes a bottom electrode plate; a dielectric layer directly above and lining the bottom electrode plate; and a top electrode plate directly above and lining the dielectric layer, where the bottom electrode plate, the dielectric layer, and the top electrode plate have encircling shapes and are arranged to be concentric with one another. A method of forming the same is also provided.
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