HEATING PLATE AND METHOD OF MANUFACTURING HEATING PLATE
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United States of America
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Issued Date -
Apr 10, 2025
app pub date -
Sep 26, 2024
filing date -
Sep 26, 2024
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Abstract
Disclosed is a heating plate for supporting and heating a substrate, the heating plate including: a base layer on which a substrate is seated; a heating wire layer located under the base layer and including a transition metal material and a metal bond; and a protective layer located under the heating wire layer and including a ceramic material and an additive material, in which the additive material is melted at a lower temperature than the ceramic material and the transition metal material, and the metal bond is a material produced by bonding of components contained in the transition metal material and the additive material.
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