Bulk Acoustic Wave Resonant Deviceresonator and Method For Manufacturing Same
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United States of America
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Issued Date -
Apr 10, 2025
app pub date -
May 20, 2024
filing date -
May 20, 2024
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Abstract
The present application discloses a bulk acoustic wave resonator and a method for manufacturing the same. The bulk acoustic wave resonator includes a substrate and a plurality of resonance assemblies arranged on the substrate, each of the plurality of resonance assemblies includes a bottom electrode, a piezoelectric layer, and a top electrode which are arranged on the substrate in sequence; the plurality of resonance assemblies are connected in sequence to form a connecting ring; the top electrode of one resonance assembly in two adjacent resonance assemblies is connected to the bottom electrode of the other resonance assembly in the two adjacent resonance assemblies, and the top electrodes of two target resonance assemblies spaced apart by one resonance assembly are connected to each other to transmit an input signal; and the bottom electrodes of the two target resonance assemblies are connected to each other to transmit an output signal.
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