LAMINATE AND ELECTROSTATIC CHUCK DEVICE
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United States of America
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Issued Date -
Apr 10, 2025
app pub date -
Jan 6, 2023
filing date -
Jan 6, 2023
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Abstract
The purpose of the present invention is to provide a laminate coated with a ceramic layer and an electrostatic chuck device, wherein the ceramic layer can be detached without damaging any member other than the ceramic layer. The present invention provides a laminate formed by stacking a member, an intermediate layer (50), and a ceramic layer (60), in which the intermediate layer (50) is a water-soluble resin containing ceramic particles, and an electrostatic chuck device (1) formed by stacking a base (10), insulating organic films (41, 42), an intermediate layer (50) and a ceramic layer (60), in which the intermediate layer (50) is a water-soluble resin containing ceramic particles.
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