APPARATUS FOR HEATING FLAT SUBSTRATE USING VCSEL MODULE
Number of patents in Portfolio can not be more than 2000
United States of America
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Issued Date -
Apr 10, 2025
app pub date -
Dec 28, 2022
filing date -
Dec 28, 2022
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status (Latency Note)
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Abstract
The present disclosure discloses a flat-substrate heating apparatus including a module supporting plate having a plurality of unit module regions formed on an upper surface thereof; a plurality of VCSEL modules having a plurality of VCSEL devices and seated on the unit module regions of the module support plate, respectively; an electric power supplying board placed below the module support plate and configured to supply an electric power to the VCSEL module; and an electrode terminal electrically connecting the VCSEL module and the electric power supplying board while detachably securing them to upper and lower surfaces of the module support plate, wherein the module support plate has a coolant supplying unit formed therein and configured to supply coolant to the VCSEL module.
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