SEED CRYSTAL SUBSTRATE AND GRAPHITE SUSCEPTOR WITH SEED CRYSTAL SUBSTRATE
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United States of America
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Apr 10, 2025
app pub date -
Jul 25, 2024
filing date -
Jul 25, 2024
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Abstract
A seed crystal substrate includes: a substrate having a GaN seed crystal on a front surface thereof; an adhesion layer formed on a back surface of the substrate; and a carbon film covering the adhesion layer. The substrate includes a GaN single crystal substrate or a sapphire substrate with a GaN film, and the adhesion layer contains Si. Thus, a carbon film having a high infrared emissivity is disposed on a back surface side of the seed crystal substrate, and heat dissipation by radiation can be sufficiently secured even under a low pressure condition. Therefore, the controllability of the substrate surface temperature can be enhanced.
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