DIMPLE PLATE ADJUSTMENT DEVICE
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United States of America
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Issued Date -
Apr 10, 2025
app pub date -
Jul 10, 2024
filing date -
Jul 10, 2024
priority date (Note) -
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status (Latency Note)
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Abstract
A dimple plate precision adjustment device includes a dimple carrier assembled on a cylindrical dimple plate and capable of transporting the cylindrical dimple plate; a dimple spacer capable of mounting the dimple carrier assembled on the dimple plate; and a plurality of gap measurers installed on the dimple spacer to be spaced apart from each other. The dimple carrier, the dimple spacer, and the gap measurers assembled on the dimple plate are installed in a body of a chamber where an antenna electrode is installed, and the gap measurers measure a gap between the gap measurers and the dimple carrier.
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