SYSTEMS AND METHODS FOR CENTRAL FREQUENCY TUNING
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United States of America
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Apr 10, 2025
app pub date -
Dec 21, 2022
filing date -
Dec 21, 2022
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Abstract
Systems and methods for central frequency tuning are described. One of the methods includes receiving a voltage signal from an output of a match coupled to a low frequency (LF) radio frequency (RF) generator and a high frequency (HF) RF generator. The method further includes dividing the voltage signal into a plurality of bins for each cycle of an LF RF signal generated by the LF RF generator. The method also includes identifying a first bin from the plurality of bins during which a zero crossing occurs, accessing measurements of a parameter for occurrences of a pre-determined number of the plurality of bins, and calculating a frequency of operation of the HF RF generator for the first bin based on the measurements of the parameter. The method includes controlling the HF RF generator to operate at the frequency of operation during an occurrence of the first bin.
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