PARTICLE BEAM SYSTEM WITH COOLING SYSTEM
Number of patents in Portfolio can not be more than 2000
United States of America
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Issued Date -
Apr 10, 2025
app pub date -
Oct 9, 2024
filing date -
Oct 9, 2024
priority date (Note) -
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status (Latency Note)
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Abstract
A particle beam system comprises: an object mount for mounting an object to be examined; a particle beam source for creating a particle beam; a lens for focusing the particle beam on the object; a detector for detecting signals created at the object by the particle beam; a cooling system configured to provide a flow of a coolant through a coolant passage through the object mount; and a controller. The cooling system comprises: a cooling mechanism configured to cool the flow of the coolant in a coolant passage through the cooling mechanism; and a pump configured to convey the coolant in order to create the flow of the coolant.
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