PARTICLE BEAM SYSTEM WITH COOLING SYSTEM
Number of patents in Portfolio can not be more than 2000
United States of America
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Issued Date -
Apr 10, 2025
app pub date -
Oct 9, 2024
filing date -
Oct 9, 2024
priority date (Note) -
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Abstract
A particle beam system comprises: an object mount for mounting an object to be examined; a particle beam source; a lens for focusing the particle beam; a detector; and a cooling system for cooling the object mount. The cooling system comprises: a coolant passage through the object mount; a supply port; an outlet; a heat exchanger having two passages; a first connecting line connected to the inlet of the coolant passage and the first passage through the heat exchanger; a second connecting line connected to the outlet of the coolant passage and the second passage through the heat exchanger; a third connecting line connected to the first passage through the heat exchanger and the supply port; a fourth connecting line connected to the second passage through the heat exchanger and the outlet; and a cooling mechanism for cooling a portion of the first connecting line.
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