PARTICLE BEAM SYSTEM WITH COOLING SYSTEM
Number of patents in Portfolio can not be more than 2000
United States of America
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Issued Date -
Apr 10, 2025
app pub date -
Oct 9, 2024
filing date -
Oct 9, 2024
priority date (Note) -
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status (Latency Note)
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Abstract
A particle beam system comprises: an object mount for mounting an object to be examined; a particle beam source; a lens for focusing the particle beam; a detector; and a cooling system for cooling the object mount. The cooling system comprises: a coolant passage through the object mount; a supply port; an outlet; a switchover valve having two positions; a first connecting line connected to the coolant passage and the switchover valve; a second connecting line connected to the coolant passage and the switchover valve; and a cooling mechanism for cooling a portion of the first connecting line. In the first position, the switchover valve connects the supply port to the first connecting line and connects the outlet to the second connecting line. In the second position, the switchover valve connects the supply port to the second connecting line and connects the outlet to the first connecting line.
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