ACTIVELY HEATED TARGET TO GENERATE AN ION BEAM
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United States of America
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Issued Date -
Apr 10, 2025
app pub date -
Oct 3, 2024
filing date -
Oct 3, 2024
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Abstract
An arc chamber for an ion source defines a chamber volume, and a target material is disposed within the chamber volume. The target material comprises a dopant species and can be contained in a target member. An indirectly heated cathode is positioned within the chamber volume and ionizes a source gas within the chamber volume, defining a plasma having a plasma thermal emission. A target heater selectively heats the target material independently from the plasma thermal emission associated with the plasma. The target heater can be a resistive heating element, inductive heating element, halogen heating element, or a laser configured to selectively heat at least a portion of the target member. The target member can consist of a solid dopant material or can contain a liquid dopant material.
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