MICRO-ELECTROMECHANICAL SYSTEMS SWITCH WITH BEAM MOVEMENT ORTHOGONAL TO FORCE

Number of patents in Portfolio can not be more than 2000

United States of America

APP PUB NO 20250118501A1
SERIAL NO

18483892

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A micro-electromechanical systems (MEMS) switch and method of fabricating the same including at least one comb drive having a first input and a second input, at least one conductive beam connected across the at least one comb drive, a first contact, and a second contact, wherein no voltage difference between the first input and the second input does not result in any movement of the MEMS switch, and wherein a voltage difference between the first input and the second input causes an electrostatic force to be generated that causes the at least one conductive beam to move in a direction orthogonal to a direction of the electrostatic force.

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Patent Owner(s)

Patent OwnerAddress
RAYTHEON COMPANY50 APPLE HILL DRIVE TEWKSBURY MA 01876

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ghodsian, Bahram San Diego, US 4 23

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