TREATMENT SOLUTION SUPPLY APPARATUS, REPORTING METHOD, AND STORAGE MEDIUM
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United States of America
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Issued Date -
Apr 10, 2025
app pub date -
Dec 17, 2024
filing date -
Dec 17, 2024
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Abstract
A treatment solution supply apparatus supplies a treatment solution to a substrate treatment apparatus which treats a substrate using the treatment solution. The treatment solution supply apparatus includes an accommodating part having compartments; in each compartment a storage container storing the treatment solution is installed from one side surface side. An acquirer provided for each of the compartments acquires identification information about the storage container from an identification information holder attached to a side surface of the storage container installed in the compartment corresponding thereto. A report part provided for each of the compartments reports an installation state of the storage container in the compartment based on an acquisition result by the acquirer for the corresponding compartment, by a light emitting state of a light-emitting element, the light-emitting element of the report part emitting light toward the one side surface side.
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