STITCHING METHOD FOR EXPOSURE PROCESS
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United States of America
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Issued Date -
Apr 10, 2025
app pub date -
Nov 14, 2023
filing date -
Nov 14, 2023
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Abstract
A stitching method for an exposure process includes following steps. A wafer is provided. The wafer includes interposer regions, each of which includes a logic chip region, a first memory chip region, and a second memory chip region. The logic chip region is located between the first and second memory chip regions. A photoresist layer is formed on the wafer. First exposure processes are performed on the photoresist layer by applying a first photomask to form first shot regions in the photoresist layer. Second exposure processes are performed on the photoresist layer by applying a second photomask to form second shot regions in the photoresist layer. The first shot regions and the second shot regions are arranged alternately in a first direction. The first shot regions and the second shot regions are overlapped to form stitching regions, each of which is not located in the logic chip region.
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