METHOD OF ASSESSING A SAMPLE, APPARATUS FOR ASSESSING A SAMPLE

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United States of America

APP PUB NO 20250116587A1
SERIAL NO

18979967

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Abstract

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The present disclosure relates to apparatus and methods for assessing samples using charged particles. In one arrangement, a degassing action is performed by exposing a target area of a sample with charged particles to stimulate degassing. A rate of degassing from the target area is measured during the degassing action. Initiation of an assessing of the sample is controlled based on a characteristic of the measured rate of degassing. The assessing of the sample comprising exposing the target area with charged particles and detecting signal charged particles from the target area.

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Patent Owner(s)

Patent OwnerAddress
ASML NETHERLANDS B VP O BOX 324 VELDHOVEN 5500 AH

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
WIELAND, Marco Jan-Jaco Delft, NL 104 1084

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