REFLECTION-TYPE OPTICAL ENCODER SCALE INCLUDING A HIGH REFLECTION REGION AND A LOW REFLECTION REGION HAVING A LIGHT REFLECTION PORTION INCLUDING A CHROMIUM OXIDE FILM AND A CHROMIUM NITRIDE FILM, AND REFLECTION-TYPE OPTICAL ENCODER INCLUDING SAME
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United States of America
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Apr 10, 2025
app pub date -
Dec 2, 2024
filing date -
Dec 2, 2024
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Abstract
A main object of the present disclosure is to provide a reflection-type optical encoder scale capable of sufficiently reducing the reflectance on a low reflection region. The present disclosure achieves the object by providing a reflection-type optical encoder scale comprising a high reflection region and a low reflection region alternately placed on a substrate, wherein the low reflection region includes a low reflection portion including a metallic chromium film formed on the substrate, and a chromium oxide film and a chromium nitride film randomly formed on the metallic chromium film; and the high reflection region has higher reflectance of incident light from opposite side to the substrate of the reflection-type optical encoder scale, than the low reflection region.
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