ROTATIONAL RATE SENSOR HAVING A SUBSTRATE AND A SENSOR ELEMENT AND METHOD FOR PRODUCING A ROTATIONAL RATE SENSOR HAVING A SUBSTRATE AND A SENSOR ELEMENT
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United States of America
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Issued Date -
Apr 10, 2025
app pub date -
Sep 16, 2024
filing date -
Sep 16, 2024
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Abstract
A rotational rate sensor having a substrate and a sensor element. The substrate is a rotor structure that can be driven to perform a rotational oscillation about a drive axis perpendicular to a main extension plane with a drive deflection using a drive device. A rotational rate can be detected using a detection device. The rotor structure includes an outer sensor frame serving as a seismic mass and a spring structure, and the spring structure is connected to the substrate in a central region using at least one substrate suspension. The spring structure between its attachment to the substrate suspension and its connection to the sensor frame includes beam elements, which extend substantially straight in sections. Each successive two of the beam elements are connected to one another at at least five points in such a way that the two beam elements form at least one 90° angle.
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