APPARATUS AND METHOD FOR QUADRATURE REDUCTION IN VIBRATORY GYROSCOPES
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United States of America
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Apr 10, 2025
app pub date -
Oct 6, 2023
filing date -
Oct 6, 2023
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Abstract
A gyroscope includes a vibratory plate with at least one notch, wherein each notch is a positive notch that is a formed by adding a mass to the vibratory plate, or a negative notch that is formed by removing a mass from the vibratory plate, and an anchor configured to support the vibratory plate. Across the wafer, a gyro design with a few different notch sizes can be designed to counteract the quadrature pattern. Depending on the type and magnitude of imperfection, a notch size and its location can be determined. The locations to add or remove a mass on the disk may be identified as follows. The locations where one gyro mode has a larger displacement while the second gyro mode has no displacement or a smaller displacement can be used to substantially impact the frequency of one of the first resonance mode or the second resonance mode. Alternatively, the locations where both gyro modes have the substantially same displacement amplitude can be used to impact the coupling between the two modes.
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