SYSTEM AND METHOD FOR CONFOCAL-CHROMATIC LINE DISTANCE MEASUREMENT
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United States of America
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Apr 10, 2025
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Dec 22, 2022
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Dec 22, 2022
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Abstract
A system for confocal-chromatic line distance measurement, comprising a line light source (2), an aperture (3), a confocal-chromatic, preferably rotationally symmetrical, measurement lens (6), and a spectrometer (14), preferably a 2D spectrometer, wherein the illumination beam path extends from the light source (2) via the aperture (3) and a first region (5) of the measurement lens (6) to the measurement object (9) and wherein the imaging beam path extends from the measurement object (6) via a second region (11) of the measurement lens (6) to the spectrometer (14). Furthermore, a method for confocal-chromatic line distance measurement is specified.
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