THROTTLE VALVE FOR SUBSTRATE PROCESSING SYSTEMS
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United States of America
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Issued Date -
Apr 10, 2025
app pub date -
May 19, 2023
filing date -
May 19, 2023
priority date (Note) -
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Abstract
A valve of a substrate processing system includes a throttle plate configured to adjust gas flow through a gas line. An outer actuator is arranged outside of the gas line. An inner actuator is arranged inside of the gas line and connected to the throttle plate. The outer actuator is magnetically coupled to the inner actuator. Movement the outer actuator causes movement of the inner actuator relative to the gas line to adjust a position of the throttle plate.
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