ELECTROPLATING CHAMBER USING JET ARRAY TO ENABLE HIGH MASS-TRANSFER

Number of patents in Portfolio can not be more than 2000

United States of America

APP PUB NO 20250116028A1
SERIAL NO

18483957

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Exemplary electroplating systems may include a vessel. The systems may include a head that is configured to hold a substrate. The head may be positionable within an interior of the vessel. The systems may include a spray jet array disposed within the interior of the vessel. The spray jet array may include a plate defining a plurality of apertures through a thickness of the plate. The systems may include at least one fluid pump that is fluidly coupled with an inlet end of each of the plurality of apertures.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

International Classification(s)

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  • 2023 Application Filing Year
  • C25D Class
  • 309 Applications Filed
  • 61 Patents Issued To-Date
  • 19.75 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances2023202420250255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bergman, Eric J Kalispell, US 97 1991
Hanson, Kyle M Kalispell, US 157 2514
Harris, Randy A Kalispell, US 29 575
Klocke, John L Kalispell, US 47 163
McHugh, Paul R Kalispell, US 119 1734
Wilson, Gregory J Kalispell, US 146 1759
Ypma, Keith Edward Kalispell, US 5 0
Zimmerman, Nolan L Kalispell, US 13 29

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Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges2910020406080100120140160180200220240260280300320

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