HEATER
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United States of America
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Issued Date -
Apr 10, 2025
app pub date -
Dec 23, 2021
filing date -
Dec 23, 2021
priority date (Note) -
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Abstract
A heater including: a base body; a high frequency electrode and a heating element arranged inside the base body; and a support body, the base body including a first surface on which a heating target is mounted, a second surface to which a first end portion of the support body is attached, a first flow path having an gas intake provided on the first surface, a second flow path having an gas exhaust provided in a region inside the support body on the second surface, and a third flow path connecting the first flow path and the second flow path, each of the high frequency electrode, the heating element, and the third flow path being arranged in a plane parallel to the first surface, the heating element and the third flow path being arranged closer to the second surface than the high frequency electrode.
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