ARC REDUCTION AND RF CONTROL FOR ELECTROSTATIC CHUCKS IN SEMICONDUCTOR PROCESSING
Number of patents in Portfolio can not be more than 2000
United States of America
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N/A
Issued Date -
Apr 10, 2025
app pub date -
Oct 6, 2023
filing date -
Oct 6, 2023
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Abstract
A semiconductor processing chamber may include a pedestal configured to support a substrate during a plasma-enhanced chemical-vapor deposition (PECVD) process that forms a film on a surface of the substrate. The chamber may also include one or more internal meshes embedded in the pedestal. The one or more internal meshes may be configured to deliver radio-frequency (RF) power to a plasma in the semiconductor processing chamber during the PECVD process. An outer diameter of the one or more internal meshes may be less that a diameter of the substrate. The chamber may further include an RF source configured to deliver the RF power to the one more internal meshes. This configuration may reduce arcing within the processing chamber.
First Claim
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Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
APPLIED MATERIALS INC | 3050 BOWERS AVENUE SANTA CLARA CA 95054 |
International Classification(s)

- 2023 Application Filing Year
- C23C Class
- 1736 Applications Filed
- 317 Patents Issued To-Date
- 18.27 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Balasubramanian, Ganesh | Fremont, US | 139 | 3648 |
# of filed Patents : 139 Total Citations : 3648 | |||
Chen, Yuanchang | Santa Clara, US | 1 | 0 |
# of filed Patents : 1 Total Citations : 0 | |||
Dun, Zhiling | Campbell, US | 2 | 0 |
# of filed Patents : 2 Total Citations : 0 | |||
Ganta, Sathya | Sunnyvale, US | 2 | 0 |
# of filed Patents : 2 Total Citations : 0 | |||
Garachtchenko, Alexander V | Brentwood, US | 10 | 12 |
# of filed Patents : 10 Total Citations : 12 | |||
Hammond, Edward P | Hillsborough, US | 18 | 912 |
# of filed Patents : 18 Total Citations : 912 | |||
Han, Xinhai | Palo Alto, US | 61 | 1469 |
# of filed Patents : 61 Total Citations : 1469 | |||
Jana, Manoj Kumar | San Jose, US | 1 | 0 |
# of filed Patents : 1 Total Citations : 0 | |||
Li, Jian | Fremont, US | 1062 | 5232 |
# of filed Patents : 1062 Total Citations : 5232 | |||
Lin, Wen-Shan | San Jose, US | 22 | 145 |
# of filed Patents : 22 Total Citations : 145 | |||
Padhi, Deenesh | Saratoga, US | 150 | 5722 |
# of filed Patents : 150 Total Citations : 5722 | |||
Rocha-Alvarez, Juan Carlos | San Carlos, US | 226 | 10949 |
# of filed Patents : 226 Total Citations : 10949 | |||
Yau, Allison | Mountain View, US | 10 | 2 |
# of filed Patents : 10 Total Citations : 2 | |||
Zhang, Wenhao | San Jose, US | 139 | 867 |
# of filed Patents : 139 Total Citations : 867 |
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- 0 Citation Count
- C23C Class
- 0 % this patent is cited more than
- < 1 Age
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