MEMS ACCELEROMETER WITH HORIZONTAL SENSE FINGERS
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United States of America
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Apr 10, 2025
app pub date -
Mar 29, 2024
filing date -
Mar 29, 2024
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Abstract
A micro-electromechanical systems (MEMS) Z-axis accelerometer can comprise a substrate, a sensor configured to measure an acceleration along an axis that extends in a direction perpendicular to a plane of the substrate, and a spring axis configured to deform axially in response to the acceleration. The sensor can include a comb finger arrangement in which a comb finger overlap area is parallel with the spring axis. Fingers of the comb finger arrangement can extend in a non-sensing direction of lowest restoring force.
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