APPARATUS AND METHOD FOR CURING FORMABLE MATERIAL
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United States of America
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Issued Date -
Apr 10, 2025
app pub date -
Oct 9, 2023
filing date -
Oct 9, 2023
priority date (Note) -
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Abstract
Apparatuses and methods are provided for curing formable material between a substrate and a superstrate. The apparatus may include a substrate chuck configured to hold the substrate and a plurality of light sources configured to provide a uniform distribution of light to a surface of the formable material in contact with a featureless surface of the superstrate, the plurality of light sources having mixed polarizations relative to each other. The apparatus may include a light source configured to provide light to the formable material on the substrate and a controller configured to control rotation of at least one of the substrate chuck and the light source to provide a uniform distribution of light to a surface of the formable material in contact with a featureless surface of the superstrate. The formable material between the substrate and the superstrate may form a planarized layer on the substrate.
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