HYBRID METHOD OF FORMING MICROSTRUCTURE ARRAY MOLDS, METHODS OF MAKING MICROSTRUCTURE ARRAYS, AND METHODS OF USE
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United States of America
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Issued Date -
Apr 10, 2025
app pub date -
May 10, 2024
filing date -
May 10, 2024
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Abstract
A method of forming a master mold (52), comprising: a) forming a plurality of microstructure portions (42) in a substrate formed of a first material by a first micromachining process, each microstructure portion comprising a shaft (40) and a distal tip (38); b) preparing a negative mold (46) of the plurality of microstructure portions, wherein the mold is formed of a second material and comprises a plurality of cavities (48) corresponding to each microstructure portion in the plurality of microstructure portions (42); c) electroplating a metal (50) onto the negative mold to fill each cavity in the plurality of cavities and to form a base layer (54) extending from the negative mold; d) forming a proximal section (56) for each of the microstructures in the base layer using a second micromachining process (e.g. mechanical micromachining); and e) before or after said step d), removing the negative mold from the metal to form a master mold.
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