METHOD FOR CORRECTING OPTICAL PATH LENGTH MEASUREMENT ERRORS OF A MEASUREMENT SCANNER AT A LASER PROCESSING OPTICAL UNIT
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United States of America
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Issued Date -
Apr 10, 2025
app pub date -
Dec 20, 2024
filing date -
Dec 20, 2024
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Abstract
A method for correcting optical path length measurement errors of a measurement scanner at a laser processing optical unit includes incoupling a measurement beam of the measurement scanner for distance measurement purposes coaxially into a processing laser beam, moving the measurement beam laterally in an x-y plane over a workpiece in a vicinity of the processing laser beam, measuring distance values by the measurement scanner at different measurement points of the workpiece, and correcting the distance values in a z-direction by change values. The change values are obtained from calculated or previously known optical path lengths of the measurement beam at different selection points in the x-y plane.
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