OPTICAL PROCESSING APPARATUS

Number of patents in Portfolio can not be more than 2000

United States of America

APP PUB NO 20250114860A1
SERIAL NO

18709309

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An optical processing device (1) includes: a robot arm (10); and a beam-transmission optical system (30), wherein the robot arm (10) includes a first arm part (11), a first joint part (16), a second arm part (12), a second joint part (17), and a third arm part (13), and the beam-transmission optical system (30) includes a first optical-path changing part (31) that changes the traveling direction of a laser beam (BM) such that the laser beam (BM) travels along a first optical path (C1) beside the first arm part (11) in accordance with the rotation of the first arm part (11) performed by the first joint part (16), and a second optical-path changing part (41) that changes the traveling direction of the laser beam (BM) having passed through the first optical path (C1) such that the laser beam (BM) travels along a second optical path (C2) beside the second arm part (12) in accordance with the rotation of the second arm part (12) and the rotation of the third arm part (13) performed by the second joint part (17).

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Patent Owner(s)

Patent OwnerAddress
NIKON CORPORATION1-5-20 NISHIOI SHINAGAWA-KU TOKYO 140-8601

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
KAWABE, Yoshio Kumagaya-shi, JP 25 59

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