PMUT with Plurality of Vent Holes
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United States of America
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Issued Date -
Apr 10, 2025
app pub date -
Sep 6, 2024
filing date -
Sep 6, 2024
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Abstract
A piezoelectric micromachined ultrasonic transducer (“PMUT”) sensor has a membrane that includes an active region that actively transmits and receives ultrasonic acoustic signals and an inactive region that contributes to the PMUT modeshape but does not actively transmit and receive ultrasonic acoustic signals. A plurality of vent holes are distributed throughout the membrane such as in the inactive region. The number and size of the vent holes are selected to provide a necessary dissipation of pressure bursts or transients while maintaining a transmission efficiency.
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