PMUT WITH CONTROLLED RESIDUAL STRESS AND PATTERNING
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United States of America
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Apr 10, 2025
app pub date -
Aug 21, 2024
filing date -
Aug 21, 2024
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Abstract
A piezoelectric micromachined ultrasonic transducer (“PMUT”) sensor has a target residual stress at one or more layers of the PMUT and also has patterning where some of the layers of the PMUT are removed. The residual stress and the patterning result in a static deflection of the PMUT. The application of the residual stress and the patterning define a vibration modeshape with desired acoustic characteristics such as improved signal-to-noise ratio (“SNR”).
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