PIEZOELECTRIC THIN-FILM, PIEZOELECTRIC THIN-FILM MANUFACTURING DEVICE, PIEZOELECTRIC THIN-FILM MANUFACTURING METHOD, AND FATIGUE ESTIMATION SYSTEM
Number of patents in Portfolio can not be more than 2000
United States of America
Stats
-
N/A
Issued Date -
Apr 3, 2025
app pub date -
Dec 28, 2021
filing date -
Dec 28, 2021
priority date (Note) -
Published
status (Latency Note)
Importance
Abstract
A piezoelectric thin film having better FoM and piezoelectric strain constant, a manufacturing apparatus and manufacturing method, and a fatigue estimation system using the film; wherein, the piezoelectric thin film is made of (MgHf)xAl1-xN in which Mg and Hf are co-doped into the Al site of AlN, where x is 0.3 or more and 0.49 or less, and has a figure of merit (FoM) of 45 GPa or more and a piezoelectric strain constant (d33) of 18 pm/V or more. Multiple first pieces made of Mg and multiple second pieces made of Hf are on the surface of a target made of AlN wherein an average surface area of each first piece is 0.9 to 1.1 times an average surface area of each second piece with respect to a surface area of the target, and a piezoelectric thin film is grown on a substrate by magnetron sputtering.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully