MULTI-COORDINATE SYSTEM CALIBRATION AND EQUIPMENT ALIGNMENT METHOD, AND MASS TRANSFER EQUIPMENT
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United States of America
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Issued Date -
Apr 3, 2025
app pub date -
Nov 2, 2022
filing date -
Nov 2, 2022
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Abstract
A multi-coordinate system calibration and equipment alignment method includes: determining a first mapping relationship between a first image pixel coordinate system of an intermediate carrier substrate carrying stage and a world coordinate system; determining a second mapping relationship between a second image pixel coordinate system of a backplane carrying stage and the world coordinate system; determining galvanometer start point coordinates in the world coordinate system; obtaining first template calibration coordinates in the world coordinate system by using the first mapping relationship and the galvanometer start point coordinates; obtaining second template calibration coordinates in the world coordinate system by using the second mapping relationship and the galvanometer start point coordinates; aligning the intermediate carrier substrate based on actual coordinates of the intermediate carrier substrate carrying stage and the first template calibration coordinates; and aligning the backplane based on actual coordinates of the backplane carrying stage and the second template calibration coordinates.
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