CARBON NANOTUBE DEVICES
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United States of America
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Issued Date -
Apr 3, 2025
app pub date -
Sep 30, 2023
filing date -
Sep 30, 2023
priority date (Note) -
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Abstract
A method includes forming, on a dielectric layer of an integrated circuit, a first layer of a first material, forming, on the first layer, a second layer of a second material, and patterning the second layer to expose the first layer. Via the patterned second layer, the exposed first layer is etched to form protrusion structures of the first layer and the second layer and grooves between adjacent ones of the protrusion structures. The method also includes forming a graphitic carbon layer on at least part of the second layer of the protrusion structures, and depositing carbon nanotubes into the grooves between the adjacent ones of the protrusion structures.
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