RESONATOR WITH OPTIMIZED LAYER THICKNESSES
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United States of America
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Issued Date -
Apr 3, 2025
app pub date -
Sep 26, 2024
filing date -
Sep 26, 2024
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Abstract
An acoustic resonator is provided that includes an interdigital transducer (IDT) at a surface of at least one piezoelectric layer, the IDT including interleaved IDT fingers extending from first and second busbars respectively. Moreover, a ratio of a thickness of the IDT fingers to a thickness of the at least one piezoelectric layer is optimized to minimize unwanted spurs. The mark to pitch ratio of the IDT fingers may also be optimized to minimize spurs during operation.
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