METHOD FOR ADJUSTING FREQUENCY OF PIEZOELECTRIC RESONATOR DEVICE AND PIEZOELECTRIC RESONATOR DEVICE
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United States of America
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Issued Date -
Apr 3, 2025
app pub date -
Jan 6, 2023
filing date -
Jan 6, 2023
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Abstract
In a crystal resonator, a frequency adjustment metal film made of a base metal layer and a metal layer is formed on a first main surface of a second sealing member. The frequency adjustment of the crystal resonator is performed by: irradiating the frequency adjustment metal film with a laser from an outside of the second sealing member to heat the base metal layer; and melting and evaporating at least part of the metal layer so that the evaporated metal layer is adhered to a second excitation electrode. The irradiation with the beam is started from an outside of a region of the metal layer. In a beam scanning direction, an end part of the metal layer is located in an inside of an end part of the base metal layer.
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