BULK ACOUSTIC WAVE RESONATOR AND METHOD FOR MANUFACTURING THE SAME
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United States of America
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Apr 3, 2025
app pub date -
Nov 27, 2024
filing date -
Nov 27, 2024
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Abstract
A method for fabricating a bulk acoustic wave (BAW) resonator includes sequentially forming a second electrode layer, a piezoelectric layer and a first electrode layer, performing a patterning process on the first electrode layer to form a first electrode and an additional electrode spaced apart from each other and electrically isolated from each other, forming a carrier structure on a first side of the piezoelectric layer, performing a patterning process on the second electrode layer to form a second electrode, forming one or more conductive pads on a second side of the piezoelectric layer, and bonding a cover structure to the second side of the piezoelectric layer.
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